1～3 item / All 3 items
Compact and high-performance Smart X-ray Orientation
●High-speed measurement in just 10 seconds ●Top illumination type ●Various optical system options ●Compatible with ingot and wafer inspection ●Measurement orientation adjustment mechanism
Corresponds to all single crystals - Flagship X-ray Orientation
●High-speed measurement in just 10 seconds ●High precision measurement <0.003°/<0.03° (1σ) ●Equipped with a sample horizontal goniometer ●Crystal orientation, Φ scan, and rocking curve measurement ●Optional extended optical systems such as monochromators ●Wafer orientation check and mapping
By replacing the sample holder, measurements can be taken from φ2.88mm chips to φ6 inch ingots!
We measure the crystal orientation of single crystals such as sapphire, SiC, and LTGA with respect to the cutting direction of the crystal axis. By changing the sample holder, measurements can be made from φ2.88mm chips to φ6 inch ingots. We also offer contract measurements, so please feel free to contact us. *For more details, please refer to the PDF document or feel free to contact us.
